SEMI C45 SPECIFICATION AND GUIDELINE FOR TETRAETHYLORTHOSILICATE (TEOS)

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SEMI C45 Document Information:

Title
SPECIFICATION AND GUIDELINE FOR TETRAETHYLORTHOSILICATE (TEOS)

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2009

Scope:

The scope of this document is all grades of tetraethylorthosilicate used in the semiconductor industry.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

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