SEMI E12 STANDARD FOR STANDARD PRESSURE, TEMPERATURE, DENSITY, AND FLOW UNITS USED IN MASS FLOW METERS AND MASS FLOW CONTROLLERS

	Purchase Information Use this form to request purchase information on SEMI online subscriptions. SEMI Collections First Name: Last Name: Email address:

Document SEMI E12 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.

You may also purchase this document alone from the IHS Standards Store.

SEMI E12 Document Information:

Title
STANDARD FOR STANDARD PRESSURE, TEMPERATURE, DENSITY, AND FLOW UNITS USED IN MASS FLOW METERS AND MASS FLOW CONTROLLERS

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2003

Scope:

This standard provides a common basis for communication between manufacturers and users.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

In the past, confusion has existed in the values of standard temperature and standard pressure when gas flow is expressed in "standard" volumetric units. To eliminate this confusion, the Mass Flow Controllers Committee has established this standard.

About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.