SEMI F74 TEST METHOD FOR THE PERFORMANCE AND EVALUATION OF METAL SEAL DESIGNS FOR USE IN GAS DELIVERY SYSTEMS
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SEMI F74 Document Information:
Title
TEST METHOD FOR THE PERFORMANCE AND EVALUATION OF METAL SEAL DESIGNS FOR USE IN GAS DELIVERY SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2003
Scope:
The test methods apply to the connection seals used in
conventional tubing type gas systems and between modules and
components to the substrates used in surface-mounted gas
systems.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This document is a test method for evaluating metal seal designs
use in gas delivery systems. It covers both surface-mounted gas
systems and conventional metal face seal fitting systems.
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