SEMI D41 MEASUREMENT METHOD OF SEMI MURA IN FPD IMAGE QUALITY INSPECTION
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SEMI D41 Document Information:
Title
MEASUREMENT METHOD OF SEMI MURA IN FPD IMAGE QUALITY INSPECTION
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2005
Scope:
This standard is applicable to FPDs. This standard mainly deals
with both the measurement method of Semu and the revised definition
of Semu. The target display size is typically from 8"(20.3cm) to
30"(76.2cm) diagonal.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard will define the application of the formula derived
in SEMI D31 to various test conditions closed to visual inspection
for MURA in FPD image quality inspection.
SEMI D31 has derived a formula to detect defects and blemishes
in FPD in comparison with human eyes and CCD based instruments.
In general the difficulty of implementing instruments to replace
human inspector lays on human factor variation with its origin and
location.
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