SEMI S21 SAFETY GUIDELINE FOR WORKER PROTECTION
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SEMI S21 Document Information:
Title
SAFETY GUIDELINE FOR WORKER PROTECTION
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2006
Scope:
This safety guideline describes methods for protection against
hazards that workers may encounter in the work area, such as
hazardous energies, physical hazards, or hazardous chemicals.
This safety guideline is intended to recommend considerations
for protecting all persons that work on or around equipment used
for semiconductor or FPD manufacturing.
This safety guideline applies to equipment suppliers and users
of equipment, including activities related to semiconductor or FPD
manufacturing, and equipment and process development
activities.
NOTICE: This safety guideline does not purport
to address all of the safety issues associated with its use. It is
the responsibility of the users of this safety guideline to
establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This safety guideline identifies preferred methods for the
protection of persons from safety and health hazards as they
perform work on or around equipment used for semiconductor or FPD
manufacturing.
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