SEMI G6 TEST METHOD FOR SEAL RING FLATNESS

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SEMI G6 Document Information:

Title
TEST METHOD FOR SEAL RING FLATNESS

Semiconductor Equipment and Materials International

Publication Date:
Jan 1, 1989

Scope:

Purpose

This specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0.330" × 0.330".

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