SEMI E123 STANDARD FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM)

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SEMI E123 Document Information:

Title
STANDARD FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM)

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2003

Scope:

The scope of this document is limited to the definition of Handling equipment behavior as perceived by a host. It defines the view of the equipment through the equipment communications interface. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

This document expands the handler equipment requirements and capabilities in the areas of the processing state model, collection event, alarm documentation, remote commands, variable item, and process program management.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This document establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this document is to facilitate the integration of Handling equipment into an automated (semiconductor) factory. This document accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.

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