SEMI F38 TEST METHOD FOR EFFICIENCY QUALIFICATION OF POINT-OF-USE GAS FILTERS

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SEMI F38 Document Information:

Title
TEST METHOD FOR EFFICIENCY QUALIFICATION OF POINT-OF-USE GAS FILTERS

Semiconductor Equipment and Materials International

Publication Date:
Jun 1, 1999

Scope:

This test method defines an evaluation method for Point-of-Use filters of various media (e.g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. Point-of-Use filters are designed to handle relatively low flow rates (0.5 – 50 slm.) and moderately high pressure drops. The filter housing and filtration element are combined into one sealed and inseparable unit.

This test method is intended to demonstrate the ability of a Point-of-Use gas filter to equal or exceed a specific particle filtration efficiency class when challenged with a monodispersed aerosol in the size range described in Section 6.6.

The efficiency class of the test method is defined as the log reduction value (LRV), where LRV is the Log [Input Concentration/System Background Level].

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using Point-of-Use (POU) gas filters.

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