SEMI E118 SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE — THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE

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SEMI E118 Document Information:

Title
SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE — THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2004

Scope:

The Wafer ID Reader Functional Standard addresses the functional requirements for a generic Wafer ID Reader interface with an upstream controller.

The specification includes required behavior and required communications for a Wafer ID Reader.

This specification does not require, define, or prohibit asynchronous messages sent by the Wafer ID Reader.

This specification intents to read the Wafer ID specified by SEMI Standard and accessed in the equipment where the wafers transfer in / out is executed with a carrier unit.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of the Wafer ID Reader Functional Standard is to provide a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller.

A standard interface will increase interchangeability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.

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