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Document SEMI D23 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI D23 Document Information:
Title
GUIDE FOR COST OF EQUIPMENT OWNERSHIP (CEO) CALCULATION FOR FPD EQUIPMENT
Semiconductor Equipment and Materials International
Publication Date:
Sep 1, 1999
Scope:
This standard focuses on each equipment in the FPD production
line. It is used to define the calculation method for cost of
installing/operating that equipment, to define the calculation
method for productivity of that equipment, and to quantify CEO of
that equipment.
It is necessary to clarify the substrate sizes that can be
handled by this equipment. However, this standard does not deal
with the equipment process performance. It takes the point of view
that each panel manufacturer should evaluate each equipment's
process performance, including yield, based on their own process
requirements
This standard does not purport to address all of the safety
issues associated with its use. It is the responsibility of the
users of this standard to establish appropriate safety and health
practices and determine the applicablity of regulatory limitations
prior to use.
Purpose
The purpose of this document is to provide a standard, simple
CEO calculation method for evaluating FPD manufacturing equipment.
With this document, the following merits can be expected:
Both panel and equipment manuf acturers, as well as material
manufacturers can work from the same standard with regard to
cost.
Panel manufacturers' basis for equipment comparison will become
clear, which will, in turn, help in equipment selection.
The document will serve to cla rify cost reduction items as well
as benchmark cost reduction activities.
Direction for improvement for equipment manufacturers will
become clear.
By doing a separate analysis, comparison, and evaluation of
lines, equipment for different substrate sizes will become
simpler.
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