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Document SEMI E126 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI E126 Document Information:
Title
SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP)
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2008
Scope:
The scope of this standard is limited to identifying key EQIPs
for select equipment process types, specifying that the equipment
shall indicate a non-null list of settable process program
parameters that impact each of these EQIPs, and specifying that the
equipment shall allow individual actuation of each of these
parameters using SEMI standard methods. The standard is not
intended to identify all quality parameters. It is not intended to
specify a complete set of equipment types.
While this standard requires that a capability shall exist for
actuation of process program parameters to influence key EQIPs, the
standard does not specify how this actuation will take place. For
example, it does not define the communication protocol for
actuation or the equipment or host models that will support and
enable this actuation capability. The scope is limited to defining
the key EQIPs and their linking to process program parameters.
The standard is structured so that EQIPs for equipment types may
be added to an existing set, as the community reaches consensus on
these additions. Further, EQIPs may be defined for a new equipment
type not previously addressed in this standard. Additions to the
standard are made utilizing the SEMI standards balloting
process.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard identifies key equipment quality information
parameters, or EQIPs, for equipment process types or groups. The
identification of these quality parameters is intended to help
equipment users and suppliers specify and utilize capabilities for
process control.
This standard is designed to be updated as EQIPs are identified
for new and/or existing equipment process types in this
standard.
Intended Audience — This standard is intended for use
by OEMs, users, and third party equipment and process control
system suppliers who need to achieve equipment and process control
of select process quality parameters, utilizing standardized
methods for actuation of process control parameters.
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