SEMI E48 SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT

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SEMI E48 Document Information:

Title
SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2001

Scope:

This specification defines the space necessary within a tool with respect to the interface plane. The specification refers to the Standard Mechanical InterFace (SMIF) Standard, SEMI E19.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports.

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