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SEMI F77 Document Information:
Title
TEST METHOD FOR ELECTROCHEMICAL CRITICAL PITTING TEMPERATURE TESTING OF ALLOY SURFACES USED IN CORROSIVE GAS SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2003
Scope:
This test method describes a procedure, based on the
electrochemical critical pitting temperature (CPT), which is used
to rank the pitting corrosion resistance of wetted surfaces of
tubing or test coupons of representative finished surfaces intended
for use in corrosive gas systems. Pitting corrosion is believed to
be a major corrosion failure mode in semiconductor gas delivery
systems, particularly in components and tubing welded and exposed
to corrosive gases.
This test method is an adaptation of ASTM G150. The adaptation
describes a method for performing the test method on coupons or
wetted-surface sections cut from gas supply system components such
as tubing. It is an aqueous immersion method.
The test method is reproducible and provides a metric (critical
pitting temperature) in addition to a qualitative (visual)
evaluation of corrosion resistance.
This test method applies to materials as specified in SEMI
Standards referenced in Section 4.1, and to welds of these
materials.
This test method may also be used for other corrosion resistant
alloys and their welds not referenced in Section 4.1.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the applicability
of regulatory or other limitations prior to use.
Purpose
The purpose of this test method is to determine the relative
resistance to pitting corrosion of the wetted surfaces of
components intended for use in corrosive gas distribution systems
for semiconductor manufacturing. This test method is intended to
differentiate between alloy compositions and processes intended to
enhance the corrosion performance of the wetted surfaces.
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