SEMI F103 SPECIFICATION FOR SIZE RANGES OF STAINLESS STEEL CANISTERS TO CONTAIN LIQUID CHEMICALS
 |
| Purchase Information |
| Use this form to request purchase information on SEMI online subscriptions. |
|
|
Document SEMI F103 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI F103 Document Information:
Title
SPECIFICATION FOR SIZE RANGES OF STAINLESS STEEL CANISTERS TO CONTAIN LIQUID CHEMICALS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2007
Scope:
This document applies to the cylindrical canisters made of
stainless steel that have a flat bottom or a skirt shaped bottom in
order to be stable.
The nominal volume of the canister which is over 40 liters is
exempted from the scope.
About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.
