SEMI E15 SPECIFICATION FOR TOOL LOAD PORT

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SEMI E15 Document Information:

Title
SPECIFICATION FOR TOOL LOAD PORT

Semiconductor Equipment and Materials International

Publication Date:
Jun 1, 1998

Scope:

This specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems, including humans, and wafer fabrication/inspection equipment (tools). The concept defines the placement and orientation of a wafer carrier on a tool to allow reasonable interfacing with mechanized material movement systems without compromising human access to perform the material exchange function.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard is intended to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.

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