SEMI E110 GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 mm LOAD PORTS

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SEMI E110 Document Information:

Title
GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 mm LOAD PORTS

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2002

Scope:

This guideline defines following recommended specifications for 300 mm load port.

• Indicator placement zone in which load port status indicators should be placed.

• Switch placement volume in which load port operation switch should be placed. 

This guideline covers the specifications for both fixed buffer equipment and internal buffer equipment.

This guideline is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Only the physical interfaces for the load port are specified; no materials requirements, micro-contamination limits, use of or logic associated with the defined physical features are given in this specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose 

This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm load port. This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers.

The zones or volumes may be defined more precisely by standardization improvement on load port design and good unification of load port operation among device manufactures. This guideline may be improved to be a specification after this effort.

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