SEMI D42 SPECIFICATION FOR ULTRA LARGE SIZE MASK SUBSTRATE CASE

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SEMI D42 Document Information:

Title
SPECIFICATION FOR ULTRA LARGE SIZE MASK SUBSTRATE CASE

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2008

Scope:

The specification defined by this standard is applicable to the case for containing substrate materials used in LCD mask manufacturing process. The objective substrate range for the mask size defined by this standard is 850 × 1,200 mm and more.

The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the substrate. This specification defines the handling volume for mask substrate inside the case.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard defines the specification for ultra large size substrate case used in LCD (Liquid Crystal Display) manufacturing process.

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