SEMI S13 ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH SEMICONDUCTOR MANUFACTURING EQUIPMENT

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SEMI S13 Document Information:

Title
ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH SEMICONDUCTOR MANUFACTURING EQUIPMENT

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2005

Scope:

This guideline applies to the documents provided to the equipment user to be used with equipment for production, measurement, assembling, and testing of semiconductor or FPD products.

This guideline contains the following item:

Purpose
Scope
Limitations
Referenced Standards
Terminology
General Criteria of Documents provided to the Equipment User
Hazards Inherent in Equipment
Hazardous Energy Control Procedures
Hazard Alerts
Hazards Inherent in Tasks
Material Safety Data Sheets (MSDS)
Personal Protection Equipment (PPE)
Equipment Inspection, Consumables, and Maintenance
Training Requirements
Emergency Contact and Response
Related Documents
Appendix 1: Document Criteria to be added to SEMI S2

NOTE 1: This document contains several Related Information sections that restate documentation criteria that appear in other SEMI documents. These restatements were current as of the dates that the Related Information sections were written and are included for the convenience of the users of this document. As the other SEMI documents may be changed at any time, the users of this document must refer to the other SEMI documents for the official versions of these criteria.

NOTE 2: This document contains several Related Information sections that include proposed subject-specific documentation criteria developed by the SEMI S13 Revision TF. It was the intent of the Task Force responsible for SEMI S13 that the criteria in these Related Information sections be incorporated in future revisions of the documents to which they pertain and that these Related Information sections be removed from SEMI S13 by revising SEMI S13 with the same effective date as the effective date of the addition of these criteria to the documents to which they pertain.

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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