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SEMI E53 Document Information:
Title
EVENT REPORTING
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2004
Scope:
This standard is applicable to any stand-alone equipment,
cluster module, cluster tool, or cell of automation in a factory.
As such it addresses event reporting at all levels in the factory
and equipment control hierarchy.
This standard requires significant communication and
computational resources and is therefore not applicable at or below
the level of I/O distribution (e.g., sensor bus) within the
equipment.
This standard covers the reporting of data periodically and/or
in response to events. Reports may also be requested on demand.
This standard presents a solution from the concepts and behavior
down to the messaging services. It does not define the messaging
protocol.
A messaging service includes the identification that a message
shall be exchanged and definition of the data which is contained in
that message. It does not include information on the structure of
the message, how the data is represented within the message, or how
the message is exchanged. This additional information is contained
with the message protocol. The defined services may be applied to
multiple protocols. Information on the mapping of these services to
special protocols (e.g., SECS II) are added as adjunct
standards.
The services assume a communications environment in which a
reliable connection has been established between the user and the
provider of the services. Establishing, maintaining, and releasing
a connection is beyond the scope of this standard.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
Access to process data in equipment is crucial for effective
process monitoring and control in a semiconductor manufacturing
facility. This standard addresses the communication needs of
semiconductor equipment and other factory objects, such as cell
controllers or recipe servers, with respect to the timely
collection and reporting of such data.
The purpose of this standard is to provide a general purpose set
of event reporting services that may be offered by equipment
suppliers. This document may be referenced, in whole or in part, by
other standards addressing higher level application domains.
The communications services defined here will enable standards
based inter-operability of independent systems. They shall allow
application software to be developed which can assume the existence
of these services and allow software products to be developed which
offer them.
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