SEMI E52 PRACTICE FOR REFERENCING GASES, GAS MIXTURES AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS

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Title
PRACTICE FOR REFERENCING GASES, GAS MIXTURES AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2009

Scope:

The list includes gases, gas mixtures, and vaporizable materials that can be used in mass flow devices. The list will supplement, not replace, existing DOT/OSHA or other identification systems. For ease of use, the list is presented sorted by gas code, gas name, and symbol for gases and vaporizable materials and by code and mixture percentage for gas mixtures.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

To provide a numerical index of gases and gas mixtures used in the semiconductor industry that will give an ordered reference for the gases and gas mixtures when used in mass flow devices. This index or list will facilitate the production and use of digital mass flow devices.

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