SEMI G67 TEST METHOD FOR THE MEASUREMENT OF PARTICLE GENERATION FROM SHEET MATERIALS
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SEMI G67 Document Information:
Title
TEST METHOD FOR THE MEASUREMENT OF PARTICLE GENERATION FROM SHEET MATERIALS
Semiconductor Equipment and Materials International
Publication Date:
Sep 1, 1996
Scope:
The method described may be used for the measurement of
particles on items such as:
• Leadframe Interleaves,
• Cleanroom Paper, and
• Packing Material.
The procedures may be used by the material manufacturer for
quality control or by a customer at incoming inspection.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This test method describes a procedure to measure particles on
sheet materials.
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