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Document SEMI E49 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI E49 Document Information:
Title
GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2004
Scope:
This document contains terminology and reference documents used
in SEMI E49.2–E49-8 and E137, which will reference performance and
method standards as well as recommended practices.
The SEMI E49 subdocuments are organized by types of piping
distribution systems — gas, DI/chemical, solvent — and by types of
assembly and testing procedures — sub-assembly for stainless steel,
sub-assembly for polymer and final tool assembly. Final assemblies
should be tested or validated for all appropriate parameters (e.g.,
purity, integrity, failure rate) as specified in the applicable E49
subdocuments.
The piping distribution documents (SEMI E49.2 through E49.8)
include guidelines for system design, performance, materials, and
components. Purity and performance grades are described for each of
the three types of distribution systems.
Users should complete an overall tool cost of ownership analysis
(see SEMI E35) to determine the optimum application of HP or UHP
tool features. Key parameters should include facilities cost and
installation cycle time, piping system reliability and
maintainability factors, tool and sub-system contribution to
contamination, and resultant effects on wafer quality and wafer
throughput factors.
Final assemblies should be evaluated according to the criteria
of SEMI S2 for Environmental, Health and Safety (EH&S) issues
associated with their use.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this overview document is to provide a basic set
of terminology and reference documents for SEMI E49.2–E49.8 and
E137.
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