SEMI C21 SPECIFICATIONS AND GUIDELINES FOR AMMONIUM HYDROXIDE
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SEMI C21 Document Information:
Title
SPECIFICATIONS AND GUIDELINES FOR AMMONIUM HYDROXIDE
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2008
Scope:
The scope of this document is all grades of ammonium hydroxide
used in the semiconductor industry.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to standardize requirements for
ammonium hydroxide used in the semiconductor industry and testing
procedures to support those standards. Test methods have been shown
to give statistically valid results. This document also provides
guidelines for grades of ammonium hydroxide for which a need has
been identified. In the case of the guidelines, the test methods
may not have been statistically validated yet.
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