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SEMI M32 Document Information:
Title
GUIDE TO STATISTICAL SPECIFICATIONS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2007
Scope:
This guide may be used when changing or adding specifications to
the order form aspect of silicon wafer specifications, such as SEMI
M1, SEMI M57, SEMI M61, or SEMI M62.
Statistical specifications apply to all processes that have been
statistically characterized. Solutions are given for two product
distribution shapes (normal & lognormal), and the advantages of
these solutions are explained. Appendix 1 shows the statistically
characterized shape for many common silicon wafer processes.
This guide applies to processes related to the production and
use of silicon wafers. It may also be applied to the production and
use of other materials.
This approach implies that the quality level shipped is the same
as the quality level produced.
This methodology can be an effective tool for driving quality
improvement.
This procedure can be coupled with other techniques for
centering the mean and reducing the variation within the process
distribution as deemed necessary by the customer and supplier.
Appendix 2 further explains the rationale for this approach.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
Specifications are based on requirements negotiated between
trading partners. This document describes an explicit specification
form that defines the risk level as a part of parametric
specifications. This approach uses process capability information
to focus quality improvement efforts, reduce sampling, and maintain
low risks. It is based on the fundamental belief that
specifications should facilitate the movement toward processed-in
quality instead of inspected-in quality.
It is important for suppliers and their customers to acknowledge
and mutually agree on quality levels so the methods employed will
satisfy their expectations. Statistical specifications provide a
convenient way to do this.
Statistical specifications are designed to facilitate the
movement toward processed-in quality. They are most appropriate for
processes that have been statistically characterized. This means
the shape of the statistical distribution that created the product
is known, or can be approximated to the satisfaction of the
customer and the supplier. It also implies that the statistical
control of the process and the measurement systems are defined to
the level that is necessary to meet the current needs.
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