SEMI E147 GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)

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SEMI E147 Document Information:

Title
GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2007

Scope:

In-Scope

This guide is applicable to semiconductor manufacturing equipment that implement the SEMI definition of the EDA interface for collecting equipment engineering data.

This guide includes the following:

Overview of the EDA interface

Overview of standards that make up the EDA interface

Relationship among the EDA interface standards

Guide for integrating and implementing the EDA standards

Out-of-Scope

This guide standard does not describe or define any interface between systems outside the equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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