SEMI F21 CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS
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SEMI F21 Document Information:
Title
CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2002
Scope:
This standard classification is to be used in the specification
of semiconductor clean environments (including process tool
environments) and of contamination control and measurement
equipment performance.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety health practices and
determine the applicability or regulatory limitations prior to
use.
Purpose
The purpose of this standard is to classify microelectronics
clean environments with respect to their molecular
(non-particulate) contaminant levels. This standard classification
provides a consistent means of communicating acceptable contaminant
levels of groups of specific airborne molecular contaminants. See
Related Information 1 appended to this standard.
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