SEMI E66 TEST METHOD FOR DETERMINING PARTICLE CONTRIBUTION BY MASS FLOW CONTROLLERS

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SEMI E66 Document Information:

Title
TEST METHOD FOR DETERMINING PARTICLE CONTRIBUTION BY MASS FLOW CONTROLLERS

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2003

Scope:

This document describes a test method that yields statistically significant comparisons of particle contribution among mass flow controllers under test conditions.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this test is to measure particle contribution by mass flow controllers (MFCs) in high-purity gas systems.

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