SEMI M45 PROVISIONAL SPECIFICATION FOR 300 mm WAFER SHIPPING SYSTEM
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SEMI M45 Document Information:
Title
PROVISIONAL SPECIFICATION FOR 300 mm WAFER SHIPPING SYSTEM
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2003
Scope:
This standard stipulates materials relating to transport of 300
mm wafers using Shipping Boxes (FOSB) regulated by SEMI M31, and
includes wafer shipping boxes, bags, labels, cushions, secondary
containers, pallets, and shipping documentation.
NOTE 1: This standard is provisional because some technical
issues are not implemented. Once these issues are addressed, this
standard should be modified and upgraded from provisional
status.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard stipulates transport related materials and systems
to minimize the total cost relating to transport of 300 mm wafers
from the wafer supplier to the customer.
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