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SEMI M45 PROVISIONAL SPECIFICATION FOR 300 mm WAFER SHIPPING SYSTEM


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SEMI M45 Document Information:

Title
PROVISIONAL SPECIFICATION FOR 300 mm WAFER SHIPPING SYSTEM

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2003

Scope:

This standard stipulates materials relating to transport of 300 mm wafers using Shipping Boxes (FOSB) regulated by SEMI M31, and includes wafer shipping boxes, bags, labels, cushions, secondary containers, pallets, and shipping documentation.

NOTE 1: This standard is provisional because some technical issues are not implemented. Once these issues are addressed, this standard should be modified and upgraded from provisional status.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm wafers from the wafer supplier to the customer.

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