SEMI C9.1 GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY PREPARED GAS MIXTURES
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SEMI C9.1 Document Information:
Title
GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY PREPARED GAS MIXTURES
Semiconductor Equipment and Materials International
Publication Date:
Jan 1, 1993
Scope:
This guideline is intended for preparation of binary gas
mixtures using individual cylinders.
It is the intent of this document to provide general guidelines
for preparation of calibration gas mixtures in compliance with ISO
6142, with additional requirements to meet the needs of the
semiconductor industry.
This guideline is applicable only to gaseous components which do
not react between themselves or with the cylinder walls, and to
condensable components which are totally vaporized under the test
conditions. It not intended for moisture calibration mixtures.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety health practices and
determine the applicability or regulatory limitations prior to
use.
Purpose
This document is intended to provide the minimum criterion for
the analysis of uncertainty associated with preparation and use of
gravimetric gas mixtures used for calibrating analytical
instruments to determine whether various SEMI impurity
specification are satisfied.
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