SEMI C30 SPECIFICATIONS AND GUIDELINES FOR HYDROGEN PEROXIDE
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SEMI C30 Document Information:
Title
SPECIFICATIONS AND GUIDELINES FOR HYDROGEN PEROXIDE
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2001
Scope:
The scope of this document is all grades of hydrogen peroxide
used in the semiconductor industry.
The VLSI grade purity level is typically required by
semiconductor devices with geometries of 0.8–1.2 microns.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety and health practices
and determine the applicability of regulatory limitations prior to
use.
Purpose
The purpose of this document is to standardize requirements for
hydrogen peroxide used in the semiconductor industry and testing
procedures to support those standards. Test methods have been shown
to give statistically valid results. This document also provides
guidelines for grades of hydrogen peroxide for which a need has
been identified. In the case of the guidelines, the test methods
may not have been statistically validated yet.
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