SEMI F65 DIMENSIONAL SPECIFICATION FOR MOUNTING BASES OF DIAPHRAGM VALVES USED WITH METRIC PFA TUBES
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SEMI F65 Document Information:
Title
DIMENSIONAL SPECIFICATION FOR MOUNTING BASES OF DIAPHRAGM VALVES USED WITH METRIC PFA TUBES
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2001
Scope:
This document applies to mounting bases for two way valves with
a diaphragm designed to shut off and/or regulate a liquid chemical
flow in tubes whose sizes are listed in Table 1.
The valves are made from materials such as PTFE or PFA, which
have high corrosion resistance and low contamination contribution
to the fluid.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the user of
this standard to establish appropriate safety and health practices
and determine the applicability of regulatory limitations prior to
use.
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