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SEMI MF1527 Document Information:
Title
GUIDE FOR APPLICATION OF CERTIFIED REFERENCE MATERIALS AND REFERENCE WAFERS FOR CALIBRATION AND CONTROL OF INSTRUMENTS FOR MEASURING RESISTIVITY OF SILICON
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2007
Scope:
This guide covers the application of Certified Reference
Materials (CRMs) for resistivity measurements on silicon wafers.
Specifically, this guide covers the use of these CRMs for preparing
resistivity reference wafers and for ensuring the quality of the
instrumentation used for preparing them.
The guide covers the selection of materials for resistivity
reference wafers, procedures for preparing and calibrating
resistivity reference wafers, and use of resistivity reference
wafers in qualifying, calibrating, and controlling various types of
resistivity instrumentation.
The guide provides criteria for selection of instruments for
determining the resistivity of silicon resistivity reference
materials, procedures for maintaining such instruments in
statistical quality control, and training requirements for
operators engaged in making and using resistivity reference
wafers.
Related Information is included that covers (1) suggested
control charting procedures for organizations that do not already
have such procedures in place, and (2) errors in resistivity
determination that result from uncertainties in wafer diameter,
wafer thickness, and probe-tip spacing.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
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