SEMI F105 GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
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SEMI F105 Document Information:
Title
GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2008
Scope:
This guide is applicable to metallic materials that are exposed
to process gases within the gas distribution systems of
semiconductor manufacturing equipment. It is not applicable to high
pressure, bulk delivery systems.
This guide is specific to High Purity and Ultra-High Purity
chemical delivery systems.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this guide is to document the industry acceptable
compatibility of metallic materials with semiconductor process
gases.
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