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Document SEMI E120 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI E120 Document Information:
Title
SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2008
Scope:
This specification provides a common set of constructs that can
be used by the equipment manufacturer to model their equipment
structure.
This specification defines the classes, attributes,
relationships, and other detail appropriate for the model of an
equipments structure as viewed by a factory host application
through the available communication interfaces.
The model contained in this specification documents features of
the equipment structure considered necessary for more than one
(current or future) equipment communication standards.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this specification is to provide a generally
applicable object model of semiconductor equipment structure. This
object model is intended to be used in the following ways:
• As a guide to equipment suppliers on how to represent the
external view of their equipment to the factory host.
• As a base model to be used and extended by other SEMI
equipment communication standards.
• As a reference for the creation of technology-specific object
model definitions, such as XML schema.
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