SEMI E16 GUIDELINE FOR DETERMINING AND DESCRIBING MASS FLOW CONTROLLER LEAK RATES

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SEMI E16 Document Information:

Title
GUIDELINE FOR DETERMINING AND DESCRIBING MASS FLOW CONTROLLER LEAK RATES

Semiconductor Equipment and Materials International

Publication Date:
Jan 1, 1990

Scope:

This guideline contains definitions of terms and procedures for determining the Leak Rates of mass flow controllers as used in the semiconductor industry.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this guideline is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers. The leak integrity of a gas delivery system is important to maintaining product quality and performance. This guideline is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates.

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