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SEMI F50 Document Information:
Title
GUIDE FOR ELECTRIC UTILITY VOLTAGE SAG PERFORMANCE FOR SEMICONDUCTOR FACTORIES
Semiconductor Equipment and Materials International
Publication Date:
Feb 1, 2000
Scope:
The scope of this guide extends beyond a discussion of typical
electric utility reliability and quality improvement techniques to
developing a continuous improvement process for electric utility
voltage sag performance (depicted graphically in Figure 2). Factors
in this process include the following:
• Define desired performance criteria by setting goals for
voltage sag event duration and magnitude (see ¶ 6.1).
• Measure performance for both proposed and existing
semiconductor factory sites (see ¶ 6.2).
• Summarize voltage sag event data and identify the impact on
semiconductor processing and facilities infrastructure equipment
(see ¶ 6.3).
• Recommend improvements that include consideration of cost,
benefit, and risk. Improvements can include corrective action to
eliminate system faults, changes to service configurations, and
power enhancements (see ¶ 6.4).
• Select and implement improvements. Establish a continuous
improvement process (see ¶ 6.5).
For the purposes of this document, the term Electric Utility
refers to energy service providers (that sell energy to
semiconductor manufacturers) and/or electric transmission and
distribution providers (that deliver energy through their power
lines).
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This guide provides a framework for semiconductor and flat panel
display (FPD) manufacturers and their electric utility service
providers to minimize the effect of voltage sag events on
semiconductor processing. In particular, this guide focuses on
electric utility power quality performance goals that are
complementary to voltage sag immunity levels for semiconductor
processing equipment and facilities infrastructure equipment (see
Figure 1). Recommendations for measuring and evaluating voltage sag
performance, evaluating utility system enhancements, and
implementation of a continuous improvement process are included
since no electric utility industry standards exist.
Utility systems are designed, constructed, and operated to meet
utility industry regulations and requirements. One important
requirement for semiconductor factories is power system
reliability. Utilities measure reliability in minutes of voltage
outages per customer per year. Semiconductor factories require a
high level of power system reliability, any service outage is
usually unacceptable. A second important requirement is power
quality. Power quality relates to disturbed voltage waveforms, not
outages. When utilities implement measures to increase power system
reliability, power quality can be adversely affected. The
structured approach defined in this guide can achieve high levels
of power quality without sacrificing power reliability.
The intent of this guide is to help semiconductor manufacturers
achieve both high levels of power reliability and power quality
from energy utility providers. By becoming familiar with the cause
and effect relationships of voltage sag events on the utility's
side of the electric meter, semiconductor manufacturers and
electric utilities can work together to pursue efficient solutions
for improved voltage sag ride-through in semiconductor
factories.
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