SEMI E67 TEST METHOD FOR DETERMINING RELIABILITY OF MASS FLOW CONTROLLER
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SEMI E67 Document Information:
Title
TEST METHOD FOR DETERMINING RELIABILITY OF MASS FLOW CONTROLLER
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2004
Scope:
This procedure applies to MFCs used in semiconductor gas
systems.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This document describes a method to help determine the ability
of an MFC to meet the manufacturer's published specifications over
its life time. The results of the test will also be useful in the
comparison of MFCs.
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