SEMI F29 TEST METHOD FOR PURGE EFFICACY OF GAS SOURCE SYSTEM PANELS
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SEMI F29 Document Information:
Title
TEST METHOD FOR PURGE EFFICACY OF GAS SOURCE SYSTEM PANELS
Semiconductor Equipment and Materials International
Publication Date:
Sep 1, 1997
Scope:
This specification applies to gas source equipment used in
semiconductor manufacturing facilities and comparable research and
development areas. It includes contamination testing requirements
for gas source systems.
The tests covered by this document are as follows:
Purge efficacy with a non-interactive gas using manufacturers'
standard purge sequence.
Purge efficacy with a non-interactive gas using the test method
specified purge sequence.
Purge efficacy with an interactive gas using manufacturers'
standard purge sequence.
Purge efficacy with an interactive gas using the test method
specified purge sequence.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
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