SEMI F64 TEST METHOD FOR DETERMINING PRESSURE EFFECTS ON INDICATED AND ACTUAL FLOW FOR MASS FLOW CONTROLLERS

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SEMI F64 Document Information:

Title
TEST METHOD FOR DETERMINING PRESSURE EFFECTS ON INDICATED AND ACTUAL FLOW FOR MASS FLOW CONTROLLERS

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2001

Scope:

This test method measures the upstream (inlet) and downstream (outlet) transient pressure influences on indicated and actual flow.

This test method yields the results of actual output flow versus MFC set-point and indicated flow as influenced by steady state inlet pressure.

This test method applies to MFCs with maximum flow ranges of up to 1000 sccm.

NOTE 1: Due to the higher sensitivity of lower flow rate MFC's when pressure transients occur, the flow range for this document is limited to 1000 sccm.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to define a method for characterizing a MFC being considered for installation into a gas distribution system. This method will quantify the effect of transient and steady state inlet and outlet pressure conditions on the performance of the MFC.

This document provides a common basis for communication between manufacturers and users regarding testing and describing MFC pressure effects.

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